> For the complete documentation index, see [llms.txt](https://atomic-data-sciences.gitbook.io/home/llms.txt). Markdown versions of documentation pages are available by appending `.md` to page URLs; this page is available as [Markdown](https://atomic-data-sciences.gitbook.io/home/case-studies/in-situ-proxy-for-ex-situ-measurements.md).

# In-situ Proxy for Ex-situ Measurements

Automated information extraction identifies and quantifies relationships between recipe and tool metrology, in-situ monitoring, and ex-situ characterization without adding time to your workflow.

<figure><img src="/files/cKc5bpPyJM6mEMqRFwRN" alt=""><figcaption><p>Original RHEED image</p></figcaption></figure>

RHEED pattern metrics were found to correlate with doping concentration determined by ex-situ XPS

<figure><img src="/files/geSiaB2VI6wzXogeDrnM" alt=""><figcaption></figcaption></figure>

The top 3 pattern features correlated with doping-composition from XPS and fit a linear regression.

![](/files/F5vpn7YUz2mL1x14DlNV)![](/files/OKz51wVZobZEKEu6YNKX)

The derived linear relationship from three initial samples was used to predict concentrations for remaining samples with good agreement to the model.

<figure><img src="/files/mYGISPuemBg5uAC7G9zy" alt=""><figcaption></figcaption></figure>