Using RHEED analysis results

Predict properties based on correlations between quantified RHEED patterns and ex-situ characterization

Example: doping concentration from XPS

Automatically detected changes in RHEED videos can be used to understand the relationship between process controls and surface characteristics. Source shuttering or various annealing steps can be correlated with metrics extracted from RHEED pattern features to develop better control over surface termination.

There are a number of examples in the literature demonstrate using the foundational clustering techniques employed in AtomCloud to engineering surfaces.

Last updated